On July 18 message, recently, north China achieves Inc. of group of science and technology (the following abbreviation " north China is achieved " ) release the quarter corrode side applied Yu Jing formally (Bevel Etch) 12 inches of plasma of craft engrave corrode machine Accura BE, so-called implementation does a law to cut corrode facility by the side of homebred brilliant " 0 " breakthrough, for our country advanced chip production quantity makes fine rate promote efficient solution personally.

▲ graph source is northward China start public order

According to introducing, in production process of parts of an apparatus, wait for technology measure as a result of polish of filmy deposit, photoetching, quarter corrode and chemical machinery grow considerably, in brilliant round brim caused inevitable by-product and hangover accumulation, the serious menace that the deposit by-product side these brilliant and hangover add the blemish risk that cause to become product fine to lead suddenly, accordingly, the brim 1mm section that the domain manufacturer such as increasing logic and memory chip begins to pay close attention to circle of 12 inches of brilliant mainly, brim position of Cong Jingyuan begins to raise chip fine to lead. Machine of the quarter corrode side brilliant promotes fine the strong safeguard of rate as industry, its importance is highlighted increasingly.

Accura BE serves as a stage homebred equipment of the quarter corrode side 12 inches of brilliant, its specifications " already amounted to level of industry main trend " , the home of IT adds the government to publicize window to be as follows:

Attemper through software system optimize the union with peculiar transmission platform, can aid force client to realize taller yield can;

Match through the choice a variety of quarter corrode gas, realize pair of PR (photoetching glue) , OX (oxide) , siN (nitrogen changes silicon) , carbon (carbon) , metal (metal) craft of the quarter corrode side the brilliant that waits for material of layer of many kinds of film is enclothed completely;

But custom-built the focusing annulus of a variety of dimension designs combination, implementation engraves the essence of corrode area to allow the position to control to plasma, offer agile, comprehensive fine to lead promotion program for the client thereby;

Have software intelligence algorithm, can carry out quantify visibly adjust, simplify maintain flow, raise equipment to manufacture efficiency.

North China is achieved express, accura BE just was released appear on the market, already behead wins logic and client of memory domain head many order, debug through craft, enter a quantity to produce level.