Be in early 2017, Our country takes development of intelligent sensor estate seriously with respect to height, industry and informatization ministry wove " intelligent sensor industry acts 3 years guideline (2017 ～ 2019) " , adjust strategic good luck to hold deepness of new generation IT period, competition ability of core of industry of promotion intelligence sensor laid a foundation.

2019, in labour the guidance that believe a ministry falls, chinese electron technology standardized an academy to begin intelligent sensor to develop strategic research, undertook trying to find out the real intention investigating to industry of sensor of our country intelligence, the sensor product of survey involves nearly 1000 our country sensor mainstream firms, it is one of activities of survey of intelligent sensor industry with our country bigger, at present more thorough dimensions.

This survey was formed " system of intelligent sensor music and development strategy white paper " report, become one of important and referenced basises that strategy of industry of sensor of our country intelligence constitutes. In the report, the 11 technologies way that offerred industry of sensor of our country intelligence to need to develop mainly and proposal, the partial focal point that this also is our country sensor blocks neck technology, we will see what sensor technology be alluded by the key.

Although 3 years time goes, but to extremely test technology precipitates, need is deep for the sensor industry that accumulates thin hair, breakthrough of our country of technology of these 11 keys is finite, still need hard!

1, MEMSTechnology andICOf the technology compositive with confluence

MEMS technology goes to all sorts of product conformity with small processing technique on the microelectronics chip that is based on silicon, have a lot of similar place with conventional IC technology, wait like polish of photoetching, filmy deposit, impure, quarter corrode, chemical machinery, a little complex small structure comes true with IC craft hard, must use small processing technique, if the system of silicon is small processing technique, surface is small processing technique.

MEMS technology will be the main production technique of prospective sensor, but development of domestic native land MEMS is faced with personnel of high-end research and development to be short of break, industrial catenary had be notted form, company profit is difficult wait for a problem, as 3 big hill is controlling domestic MEMS industry.

MEMS is used at automobile safety gasbag at first, develop as the technology in recent years, market demand is swift and violent, the change that will give people life to bring as computer technology and microelectronics technology is same, MEMS technology also brings the life that gives us tremendous change.

2, MEMSTop chip

MEMS gyroscope is the fundamental component of semiconductor industry, domain utility waits in consumptive electron, industry extensive, technical doorsill is in sensor domain higher level, domestic and international strength of each firm investment is great, but job of high-end product research and development basically is centered in college and place of scientific research courtyard.

Euramerican day has a batch of relevant enterprises and scientific research unit to gain revolutionary headway in this domain, but Chinese this respect starts late, progress is slow, home has the enterprise can be counted on one's fingers that MEMS top chip is designed independently and measures yield ability, and crop and market are had rate is very low.

According to " Chinese sensor (technology and industry) develop blue book " the introduction, the MEMS top chip that manufacturer of electron of domestic numerous consumption uses in great quantities relies on an entrance basically, rate of entrance of chip of conservative estimation MEMS amounts to 80% above.

3, high-powered magnetism sensor

Threshold of technology of high-powered magnetism sensor is high, the market range of wide, application is big, in industrial automation control, the domain such as medical treatment equipment and auto industry all is put in huge demand, annual the whole world sells even more billions of, amount amounts to one billion four hundred and ten million and sixty-five thousand four hundred and eight dollars.

It is with traditional fuel car exemple, on every car install sensor of more than 30 magnetism on average, cover face of crankshaft, circuit, footplate, fluid, card to buckle wait for nearly 20 kinds of application. And drive automatically in intelligence on the car, the application of these sensor is will more, more meticulous.

However the car that at present Chinese market sells, magnetism sensor is all by foreign manufacturer forestall, count an import badly, huoniweier (Honeywell) , village cropland (MURATA) , essence of life measures an electron (MEAS) , collect Mu (ROHM) waited for foreign manufacturer to whack this one market.

Nicety is made, the high-end magnetism sensor that the labour such as equipment of exploration, electric power, instrument accuses a domain to use is same by international sensor tycoon accuse, bury next tremendous hidden trouble to our country industry upgrades and changing a course independently.

Foundation of research and development of production domain of domestic magnetism sensor is very fragile, equipment, talent is accumulated finite, product function, fine tastes rate, cost, pull current Cheng to the respect is optimized urgently and rise etc.

In the meantime, home market also should give aid to manufacturer of domestic magnetism sensor, the industry undertakes breeding reaching popularizing to the market of own product inside catenary limits.

4, MEMSMiniature ultrasonic sensor

Sensor of MEMS miniature ultrasonic is having capacious applied setting in consumptive electron domain, for example the near future of mobile phone manufacturer such as millet, OPPO rolls out thick and fast " immensity casing " mobile phone, to be in narrow the inductive sensor that narrow frame fills in to be used at breath screen function, sensor of MEMS miniature ultrasonic is means of first-rate maturity application.

Principle of job of sensor of range finding of MEMS miniature ultrasonic and common sensor sensor are same, receive ultrasonic through blasting off, exploration object is apart from, but volume is very minor, be helpful for compositive, in terminal of smartphone, intelligence, intelligence household home appliance, intelligence handles official bussiness the use setting such as equipment is capacious.

Bulk of sensor of range finding of MEMS miniature ultrasonic is less than the 1/10 of current and congener product, product implementation needs to achieve high temperature resistant stick outfit craft requirement, and in miniature craft of treatment of the chip that suppress report, miniature assembles craft, (MEMS) the respect such as development of data of craft pressing report has relatively hi-tech difficulty.

At present on the market, this technology basically is broken by ribbing of Japanese enterprise village, home did not have design and quantity to produce the business of ability.

5, chip of pressure sensor of silicon of wide lukewarm area

Pressure sensor all the time since it is one of shipment volume, use amount is the largest types inside sensor domain, especially pressure sensor of silicon of wide lukewarm area and chip, this also is the way with bigger difference of advanced level of our country and world.

Come from index of specific technology parameter say, use temperature limits is in - between 225 ℃ of 55 ℃ ～ , the Gao Ke of precision excel 0.25%FS relies on pressure sensor of silicon of sexual MEMS high temperature is the focal point that earnestly requires to break through.

In the meantime, low stress is enclosed without down-lead, temperature compensation, high temperature is special circuit (ASIC) the crucial technology such as chip, development is measured dominate interface circuit, it is the key that implementation batch turns production and uses in great technology equipment.