Sensor of door of MEMS magnetic flux is one kind is based on system of personal computer cable (the sensor of RB521S-30 magnetic field of MEMS) technology, can measure the magnetic field intensity in surroundings and way. It can apply at many domains, wait like electron of perception of navigation, position, car, smartphone and medical treatment equipment. However, in this domain, only at present a few a few orgnaizations undertook relevant research and development work. The article will introduce the case of sensor of door of magnetic flux of 9 development MEMS.

1, Masschusetts Institute of Technology (MIT) : The research group of MIT obtained striking progress in respect of sensor of door of MEMS magnetic flux. The sensor of door of MEMS magnetic flux that they developed a kind of tall sensitivity, can measure little magnetic field change. This sensor used a kind of special data, can increase the sensitivity of sensor and stability.

2, Stanford university (Stanford University) : The research group of Stanford university also obtained significant breakthrough in domain of sensor of door of MEMS magnetic flux. They designed sensor of door of magnetic flux of MEMS of a kind of miniature, can use at magnetic field to measure with magnetism navigation. When this sensor has higher resolution and fast noise to answer.

3, school of component of interest of gram of California university uncle (UC Berkeley) : The research group of UC Berkeley devotes oneself to to develop sensor of high-powered door of MEMS magnetic flux. They used a kind of new-style small processing technique, can make the magnetic field sensor that gives high accuracy. This kind of sensor has inferior power comsumption and taller letter a confusion of voices to compare.

4, university of Hong Kong science and technology (HKUST) : The research group of HKUST is dedicated study at the small processing technique of sensor of door of MEMS magnetic flux. They developed a kind of magnetoresistive type sensor that is based on MEMS technology, can measure extremely weak magnetic field. This sensor has taller sensitivity and stability.

5, Tsinghua university (THU) : The research group of Tsinghua university devotes oneself to the applied research of sensor of door of MEMS magnetic flux. The system of sensor of door of MEMS magnetic flux that they developed a kind to be used at magnetism navigation, can measure magnetic field intensity and way in real time, calculate a position and directional information.

6, Beijing University (Peking University) : The research group of Beijing University obtained positive result of a few innovation in respect of sensor of door of MEMS magnetic flux. The magnetism that they developed a kind to be based on MEMS technology quick resistor sensor, can measure magnetic field to change and output voltage signal. This sensor has taller precision and reliability.

7, Shanghai traffic university (SJTU) : The research group of Shanghai traffic university devotes oneself to the research of small processing technique of sensor of door of MEMS magnetic flux. They developed sensor of a kind of miniature magnetoresistive type that is based on MEMS technology, can measure magnetic field intensity and way in real time. This sensor has lesser dimension and inferior power comsumption.

8, haing Buddha university (Harvard University) : The research group of haing Buddha university undertook in domain of sensor of door of MEMS magnetic flux a few innovation study. The magnetism that they developed a kind to be based on MEMS technology navigation system, can measure magnetic field to change in real time and computation gives the position and directional information. When this system has taller fixed position precision and fast noise to answer.

9, Oxford (University Of Oxford) : The research group of Oxford devotes oneself to the data research of sensor of door of MEMS magnetic flux. They developed a kind of new-style magnetism quick material, can increase the sensitivity of sensor and stability. This kind of material can apply in the production of sensor of door of MEMS magnetic flux, improve the performance of sensor.

As a whole, the research of these 9 orgnaizations in domain of sensor of door of MEMS magnetic flux and development work obtained a few significant progress. Their innovation achievement conduces to the development that promotes technology of sensor of door of MEMS magnetic flux, increase the function of sensor and applied scope. As the ceaseless development of these research, believe sensor of door of MEMS magnetic flux to will get applied in more domain, rise to urge action actively to the development of relevant industry.